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Updated: Mar 27 2025
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Silicon EPI Wafers

8" Wafers, 6" Wafers, 4" Wafers, 3" Wafers
8" Wafers
Note: Surface - P = Polished, E = Etched, C = AsCut, G = Ground, Ox = Oxide (on that surface)
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Cart		 Item Qty in Stock Price $/wafer Substrate (bottom) EPI Source Comment
Size Type-Dopant Res Ωcm Surf. Thick μm Type-Dopant Res Ωcm
11141 23 $250.00 8"Ø×725μm p- Si:B[100] 0.004-0.020 P/E 5 ±0.5 p- Si:B (Top) 8.6-10.4 NCIT p/p+, SEMI Notch

6" Wafers
Note: Surface - P = Polished, E = Etched, C = AsCut, G = Ground, Ox = Oxide (on that surface)
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Cart		 Item Qty in Stock Price $/wafer Substrate (bottom) EPI Source Comment
Size Type-Dopant Res Ωcm Surf. Thick μm Type-Dopant Res Ωcm
5541 75 $48.60 6"Ø×675μm n- Si:P[100] 0.001-0.002 P/EOx 3.20 ±0.16 n- Si:P (Top) 0.32-0.46 Montco n/n+

4" Wafers
Note: Surface - P = Polished, E = Etched, C = AsCut, G = Ground, Ox = Oxide (on that surface)
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Cart		 Item Qty in Stock Price $/wafer Substrate (bottom) EPI Source Comment
Size Type-Dopant Res Ωcm Surf. Thick μm Type-Dopant Res Ωcm
A305 10 $67.80 4"Ø×525μm p- Si:B[111] 0.002-0.003 P/E 34 ±3 n- Si:P (3.8-5.2) ITME n/p+
6892 9 $88.00 4"Ø×525μm n- Si:As[111] 0.0010-0.0035 P/E 5 ±0.4
15 ±1.2
30 ±2.25		 n- Si:P
n- Si:P
n- Si:P (Top)		 1.35-1.65
3.6-4.4
9.9-12.1		 ITME n/n/n/n+
11115 3 $87.00 4"Ø×525μm n- Si:As[111-4°] ±0.5° 0.0010-0.0035 P/E 10
55
20		 n- Si:P
n- Si:P
p- Si:B
(Top)		 ~2.0
~27.5
~1.5		 ITME n/n/n+
C851 7 $59.80 4"Ø×400μm n- Si:As[111] 0.001-0.005 P/E 20.0 ±2.0 n- Si:P 0.081-0.099 ITME n/n+
J892 4 $120.00 4"Ø×525μm n- Si:Sb[111] 0.008-0.020 P/E 5 ±0.5
15 ±1.5
58 ±6		 n- Si:P
n- Si:P
n- Si:P (Top)		 2.7-3.3
7.2-8.8
59.4-60.6		 ITME n/n/n/n+
11515 3 $93.00 4"Ø×525μm n- Si:Sb[111-3.5°] ±1.0° 0.008-0.020 P/E 15
22.5		 n- Si:P
p- Si:B (Top)		 5.1-6.9
~15		 ITME p/n/n+

3" Wafers
Note: Surface - P = Polished, E = Etched, C = AsCut, G = Ground, Ox = Oxide (on that surface)
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Cart		 Item Qty in Stock Price $/wafer Substrate (bottom) EPI Source Comment
Size Type-Dopant Res Ωcm Surf. Thick μm Type-Dopant Res Ωcm
K827 3 $98.00 3"Ø×381μm p- Si:B[111] 0.004-0.008 P/E 12.5 ±2.5
140 ±10		 p- Si:B
n- Si:P (Top)		 ~2.35
~33.6		 ITME n/p/p+
7762 5 $58.00 3"Ø×381μm n- Si:As[111] 0.001-0.005 P/E 13 ±1.3 n- Si:P (Top) 1.17-1.43 ITME n/n+
F667 96 $28.00 3"Ø×525μm n- Si:P[111] 0.001-0.005 P/E 4.5 n- Si:P (Top) 1.1-1.4 Motrla n/n+, Red Phos substrates, in 24 wafer cassettes

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